Common Tungsten Evaporation Boat Models
Tungsten evaporation boats are made of 99.95% high-purity tungsten, withstanding temperatures up to 3422℃, making them an irreplaceable core component in vacuum coating. Modern composite ceramic technology is breaking through its limitations, improving coating uniformity and stability. Tungsten evaporation boats (also known as coating tungsten boats) are core components in the vacuum coating industry, made from tungsten sheets with a purity of up to 99.95% through welding or high-temperature stamping processes. This special vessel inherits the excellent properties of metallic tungsten: a density of 19.3 g/cm³, a melting point as high as 3422℃, and high strength, high hardness, and excellent wear resistance. In a vacuum environment, its low evaporation rate and low vapor pressure make it an ideal evaporation source material.
In terms of applications, tungsten evaporation boats are widely used in vacuum coating scenarios such as gold plating, cathode ray tube mirrors, electron beam painting, and semiconductor device manufacturing. Their excellent high-temperature resistance (withstanding operating temperatures above 2000℃) and stable chemical properties also make them outstanding in vacuum annealing processes. It is particularly noteworthy that while modern high-performance ceramic composite materials (such as boron nitride-titanium diboride systems) have partially replaced traditional tungsten boats, tungsten evaporation boats remain an irreplaceable choice for applications requiring extremely high stability.
There are many types of evaporation boats; how should one choose?
From a material manufacturer’s perspective, the selection can be based on material and size.
1. Selection based on the melting point and evaporation temperature of the film to be deposited
Based on the melting point and evaporation temperature of the film, and whether it reacts, determine whether to use a tungsten boat, molybdenum boat, or tantalum boat.
Generally, tungsten and molybdenum boats are more commonly used.
2. Selection based on size
Although there are many manufacturers, brands, and models of evaporation equipment, generally speaking, the boat can be selected based on its length, width, and thickness. For a more precise selection, the tank length can be considered.
2.1 Commonly used tungsten boat models are as follows:
2.2 Commonly used molybdenum boat models are as follows:
Modern evaporation boat technology is developing towards composite materials, overcoming the limitations of traditional tungsten boats through material innovation. For example, boron nitride-titanium diboride composite ceramic materials retain the high-temperature properties of tungsten while improving thermal shock resistance. In terms of arrangement, staggered layouts are gradually replacing linear arrangements, allowing vapor clouds to support each other and significantly improving coating uniformity.
Post time: Dec-22-2025